The HiPIMS Process
نویسنده
چکیده
.....................................................................................................I POPULÄRVETENSKAPLIG SAMMANFATTNING .......................................III PREFACE....................................................................................................... V PUBLICATIONS INCLUDED IN THE THESIS............................................. VII RELATED PUBLICATIONS NOT INCLUDED IN THE THESIS.................... IX ACKNOWLEDGEMENTS ............................................................................. XI CONTENTS ................................................................................................. XIII VARIABLES AND CONSTANTS ............................................................... XVII
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Hysteresis-free reactive high power impulse magnetron sputtering
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